Exploring the Influence of a Focusing and Gaussian Profile Electron Beam in SEM Imaging through Monte Carlo Simulation

Zhang, P

Zhang, P (reprint author), Yangtze Normal Univ, Sch Elect Informat Engn, Chongqing 408003, Peoples R China.; Zhang, P (reprint author), Huazhong Univ Sci & Technol, Tongji Med Coll, Sch Pharm, Wuhan 430030, Hubei, Peoples R China.

MOSCOW UNIVERSITY PHYSICS BULLETIN, 2018; 73 (1): 89

Abstract

Gaussian profile is conventionally assumed as the probe shape of the incident electron beam in theoretical analysis of dimensional measurements by a s......

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