MEMS Electrostatically Driven Coupled Beam Filter Banks

Syms, R; Bouchaala, A

Syms, R (通讯作者),Imperial Coll London, Dept Elect & Elect Engn, Exhibit Rd, London SW7 2AZ, England.

MICROMACHINES, 2023; 14 (12):

Abstract

MEMS bandpass filters based on electrostatically driven, mechanically coupled beams with in-plane motion have been demonstrated up to the VHF band. Fi......

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