Piezoelectric MEMS: Ferroelectric thin films for MEMS applications

Kanno, I

Kanno, I (reprint author), Kobe Univ, Dept Mech Engn, Kobe, Hyogo 6578501, Japan.

JAPANESE JOURNAL OF APPLIED PHYSICS, 2018; 57 (4):

Abstract

In recent years, piezoelectric microelectromechanical systems (MEMS) have attracted attention as next-generation functional microdevices. Typical appl......

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