MEMS mirrors: The next big wave in MEMS technology

Ristic, LJ

Ristic, LJ (通讯作者),Mirrorcle Technol, Richmond, CA 94804 USA.

LASER FOCUS WORLD, 2023; 59 (9): 30

Abstract

Microelectromechanical systems (MEMS) mirrors are making their way into new applications after decades of intensive development efforts.

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