Self-Aligned AlGaN/GaN FinFETs

Brown, DF; Tang, Y; Regan, D; Wong, J; Micovic, M

Brown, DF (reprint author), HRL Labs LLC, Malibu, CA 90265 USA.

IEEE ELECTRON DEVICE LETTERS, 2017; 38 (10): 1445

Abstract

We have demonstrated highly scaled, self-aligned AlGaN/GaN fin-shaped field-effect transistors (FinFETs), which were fabricated using e-beam lithograp......

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