Self-aligned graphene transistor

Zeng, RZ; Li, P; Li, JH; Liao, YB; Zhang, QW; Wang, G

Li, P (reprint author), Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu, Sichuan, Peoples R China.

ELECTRONICS LETTERS, 2017; 53 (24): 1592

Abstract

A novel self-aligned (SA) graphene FET (GFET) with small access resistance is fabricated. Only one photolithography is needed to define the gate and h......

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