Wafer-Scale Statistical Analysis of Graphene FETs-Part I: Wafer-Scale Fabrication and Yield Analysis

Smith, AD; Wagner, S; Kataria, S; Malm, BG; Lemme, MC; Ostling, M

Smith, AD (reprint author), KTH Royal Inst Technol, Dept Integrated Devices & Circuits, S-16440 Kista, Sweden.

IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017; 64 (9): 3919

Abstract

Wafer-scale, CMOS compatible graphene transfer has been established for device fabrication and can be integrated into a conventional CMOS process flow......

Full Text Link


Links

期刊讨论 | 中国SCI论文 | 期刊主页 | 投稿经验 | 杂志官网 | 投稿链接 | 作者需知 | PMC链接 | Pubmed全文检索