240x240 Wafer-Scale Silicon Photonic Switches

Seok, TJ; Kwon, K; Henriksson, J; Luo, JH; Wu, MC

Seok, TJ (reprint author), Gwangju Inst Sci & Technol, 123 Cheomdangwagi Ro, Gwangju 61005, South Korea.; Seok, TJ (reprint author), Univ Calif Berkeley, 550 Sutardja Dai Hall, Berkeley, CA 94720 USA.

2019 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC), 2019; ():

Abstract

We report on 240x240 silicon photonic MEMS switches on 4cm x 4cm dies realized by wafer-scale integration and reticle stitching. The maximum on-chip l......

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