STRESS-DEPENDENT LOCAL OXIDATION OF SILICON

Evans, JD; King, JR

Evans, JD (reprint author), Univ Bath, Dept Math Sci, Bath BA2 7AY, Avon, England.

SIAM JOURNAL ON APPLIED MATHEMATICS, 2017; 77 (6): 2012

Abstract

The two-dimensional isolation oxidation of silicon is considered for stress-dependent reaction and diffusion coefficients. The influence of such param......

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