Cubic-inch MOEMS Spectral Imager

Nasila, A; Holmlund, C; Briede, E; Mannila, R; Trops, R; Blomberg, M; Stuns, I; Guo, B; Viherkanto, K; Rainio, K; Saari, H; Rissanen, A

Nasila, A (reprint author), VTT Tech Res Ctr Finland Ltd, Espoo, Finland.

MOEMS AND MINIATURIZED SYSTEMS XVIII, 2019; 10931 ():

Abstract

Recently developed tunable MEMS Fabry-Perot interferometers based on Ag thin-film mirrors[1] have enabled building highly miniaturized spectral imager......

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