Abstract
Trops, R; Nasila, A; Holmlund, C; Toivanen, H; Mannila, R; Stuns, I; Briede, E; Viherkanto, K; Blomberg, M; Saari, H
Trops, R (通讯作者),VTT Tech Res Ctr Finland Ltd, Tietotie 3,PL 1208, Espoo 02150, Finland.
MOEMS AND MINIATURIZED SYSTEMS XXI, 2022; 12013 ():