A Continuous, Impedimetric Parylene Flow Sensor

Hudson, TQ; Meng, E

Meng, E (corresponding author), Univ Southern Calif, Dept Biomed Engn, Los Angeles, CA 90089 USA.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (3): 456

Abstract

A continuously recording, impedimetric thermal liquid flow sensor fabricated on a Parylene C thin film substrate is presented for the first time. The ......

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