A Piezo-Avalanche Accelerometer

Joy, AP; Kanygin, M; Bahreyni, B

Bahreyni, B (corresponding author), Simon Fraser Univ, Sch Mech Syst Engn, Surrey, BC V3T 0A3, Canada.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020; 29 (2): 144

Abstract

We are reporting on the first use of the piezo-avalanche effect in a micromachined sensor for the measurement of inertial forces. The device integrate......

Full Text Link