Review of micromachined optical accelerometers: from mg to sub-mu g

Lu, QB; Wang, YA; Wang, XX; Yao, Y; Wang, XW; Huang, W

Lu, QB; Huang, W (corresponding author), Northwestern Polytech Univ, Frontiers Sci Ctr Flexible Elect FSCFE, Shaanxi Inst Flexible Elect SIFE, Xian 710072, Peoples R China.; Lu, QB; Huang, W (corresponding author), Northwestern Polytech Univ, Shaanxi Inst Biomed Mat & Engn SIBME, Xian 710072, Peoples R China.; Lu, QB; Huang, W (corresponding author), Northwestern Polytech Univ, MIIT Key Lab Flexible Elect KLoFE, Xian 710072, Peoples R China.

OPTO-ELECTRONIC ADVANCES, 2021; 4 (3):

Abstract

Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-......

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