Movement of a-type dislocations in AlN under electron beam irradiation

Huang, J; Niu, MT; Su, XJ; Xu, K

Xu, K (corresponding author), Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Ruoshui Rd 398,Suzhou Ind Pk, Suzhou 215125, Peoples R China.

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2020; 53 (6):

Abstract

Significant a-type dislocation movement was directly observed in AlN films using a transmission electron microscope (TEM). Most of the a-type dislocat......

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