Multiaxial resonant MEMS force sensor

Dabsch, A; Rosenberg, C; Klug, P; Stifter, M; Keplinger, F

Dabsch, A (reprint author), Vienna Univ Technol, Inst Sensor & Actuator Syst, Gusshaustr 27-29, Vienna, Austria.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2018; 28 (10):

Abstract

Miniaturized force sensors are indispensable components in various applications such as atomic force microscopes. In most cases the sensor is sensitiv......

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