Strain effect on performance of multi-stacked gate-all-around CMOS inverters

Kim, K; Lee, JH; Oh, S

Oh, S (corresponding author), Hanyang Univ, Dept Elect & Elect Engn, Ansan 15588, South Korea.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2020; 35 (12):

Abstract

We investigated the circuit performance of gate-all-around (GAA) CMOS inverters including strain for various sub-7 nm technology node device architect......

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