Anodic Bonding Using Gorilla Glasses

Hsu, CH; Chen, G; Lin, YH; Cheng, MMC

Cheng, MMC (reprint author), Dept Elect & Comp Engn, Micro Nano Technol Lab, 5050 Anthony Wayne Dr 3140, Detroit, MI 48202 USA.

2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2017; ( ): 566

Abstract

For the first time, this paper investigates anodic bonding using the latest chemically-strengthened glass called Gorilla Glass (from Corning). Gorilla......

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