Multi-Frequency Piezoelectric Micromachined Ultrasonic Transducers

Kazari, H; Kabir, M; Mostavi, A; Ozevin, D

Ozevin, D (reprint author), Univ Illinois, Dept Civil & Mat Engn, Chicago, IL 60607 USA.

IEEE SENSORS JOURNAL, 2019; 19 (23): 11090

Abstract

In this paper multi-frequency piezoelectric MEMS ultrasonic transducers (pMUTs) are designed, characterized and tested for nondestructive evaluation (......

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