Anodic Imprint Lithography: Direct Imprinting of Single Crystalline GaAs with Anodic Stamp

Kim, K; Ki, B; Choi, K; Oh, J

Oh, J (reprint author), Yonsei Univ, Sch Integrated Technol, 8S Songdogwahak Ro, Incheon 21983, South Korea.

ACS NANO, 2019; 13 (11): 13465