Porous AlN films grown on C-face SiC by hydride vapor phase epitaxy-MedSci.cn

Porous AlN films grown on C-face SiC by hydride vapor phase epitaxy

Chen, JF; Huang, J; Li, DD; Xu, K

Huang, J; Xu, K (通讯作者)，Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China.