Modulation of Molybdenum oxidation state via Catalytic-oxidation

Lee, KC; Sun, SH; Ko, HYS; Cho, SB; Lee, GGY; Lee, DS; Song, TS; Paik, U

Song, TS; Paik, U (通讯作者)，Hanyang Univ, Dept Energy Engn, Seoul, South Korea.

APPLIED SURFACE SCIENCE, 2023; 615 ():

Abstract

Molybdenum (Mo) is a promising metal contact material to replace tungsten due to its low electrical resistivity in sub-3 nm next-generation semiconduc......

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