Self-Align-Gated GaN Field Emitter Arrays Sharpened by a Digital Etching Process

Shih, PC; Rughoobur, G; Cheng, K; Akinwande, AI; Palacios, T

Shih, PC; Palacios, T (corresponding author), MIT, Microsyst Technol Labs, Cambridge, MA 02139 USA.

IEEE ELECTRON DEVICE LETTERS, 2021; 42 (3): 422

Abstract

Field emitters are attracting much attention recently because of their potential for high-frequency and harsh-environment applications. Although silic......

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