Design, modeling, and control of a monolithic compliant x-y-theta microstage using a double-rocker mechanism

Yang, YL; Wu, GH; Wei, YD

Yang, YL (corresponding author), Ningbo Univ, Fac Mech Engn & Mech, Part Rolling Key Lab Zhejiang Prov, Ningbo 315211, Peoples R China.

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2021; 71 (): 209

Abstract

This paper reports the design, modeling, and control of a novel three-degrees-of-freedom piezoelectric compliant microstage by introducing a new doubl......

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