Mapping vapor - solid distributions of silicon germanium chemical vapor depositions

Tomasini, P

Tomasini, P (corresponding author), Silicon Prod Grp, Appl Mat, 974 E Arques Av, Sunnyvale, CA 94085 USA.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2021; 123 ():

Abstract

A Thermodynamic analysis of Si1-xGex Chemical Vapor Deposition via SiH4 and GeH4 was conducted for a complete determination of the Vapor - Solid distr......

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