Numerical calculation of the mosaic error between mosaic gratings

Yang, GJ; Qi, XD; Mi, XT; Zhang, SW; Yu, HZ; Yu, HL; Li, XT; Yang, S

Qi, XD (corresponding author), Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Jilin, Peoples R China.

APPLIED OPTICS, 2020; 59 (13): 4048

Abstract

The theoretical calculation model for a mosaic error was established based on the plane equation for a grating surface and the relationship equation f......

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