INVESTIGATION OF MULTIPLE SOFT BREAKDOWN DURING TIME-DEPENDENT DIELECTRIC BREAKDOWN

Wu, QW; Yin, BF; Zhou, K; Wang, J; Gao, JD

Wu, QW (reprint author), Huali Microelect Corp, Shanghai 201203, Peoples R China.

2017 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC 2017), 2017; ( ):

Abstract

In this paper, we studied the multiple soft breakdown phenomena of gate oxide during TDDB (Time Dependent Dielectric Breakdown). after the soft breakd......

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