Location tracking scanning method based on multi-focus in confocal coordinate measurement system

Gu, K; Li, YF; You, XY; Wang, YH; Cui, JW; Wang, XW; Liu, CG; Liu, J

Liu, J (corresponding author), Harbin Inst Technol, Sch Instrumentat Sci & Engn, Adv Microscopy & Instrumentat Res Ctr, Harbin 150080, Peoples R China.

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2021; 71 (): 170

Abstract

Confocal microscopy is high precision and widely used method for topography measurement. The surface height information is obtained by peak extraction......

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