Facile fabrication of Si-based nanostructures

Meng, LK; Yan, J

Meng, LK (reprint author), Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China.; Meng, LK (reprint author), Univ Chinese Acad Sci, Beijing 100049, Peoples R China.

ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING VI, 2017; 10149 ( ):

Abstract

In this work, we present an attractive and novel fabrication technique that can produce highly-controlled silicon-based nanostructures in wafer-scale ......

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