A universal method for depositing patterned materials in situ

Chen, YF; Hung, SF; Lo, WK; Chen, Y; Shen, Y; Kafenda, K; Su, J; Xia, KW; Yang, S

Xia, KW; Yang, S (corresponding author), Chinese Univ Hong Kong, Dept Phys, Shatin, Hong Kong, Peoples R China.; Yang, S (corresponding author), Chinese Univ Hong Kong, Shenzhen Res Inst, Shatin, Hong Kong, Peoples R China.

NATURE COMMUNICATIONS, 2020; 11 (1):

Abstract

Current techniques of patterned material deposition require separate steps for patterning and material deposition. The complexity and harsh working co......

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