Quasi-static kinematics model for motion errors of closed hydrostatic guideways in ultra-precision machining

Shi, CC; Wang, ZZ; Peng, YF; Lei, PL; Li, CL

Wang, ZZ (corresponding author), Xiamen Univ, Dept Mech & Elect Engn, Xiamen 361005, Peoples R China.

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2021; 71 (): 90

Abstract

Aspheric optics has been widely employed in some high-tech industries for its superiority. In order to achieve the ultra-precision machining of these ......

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