Temperature Performance Study of SAW Sensors Based on AlN and AlScN

Wang, H; Zhang, LW; Zhou, ZX; Lou, L

Lou, L (通讯作者)，Shanghai Univ, Sch Microelect, Shanghai 201800, Peoples R China.;Lou, L (通讯作者)，Shanghai Ind Technol Res Inst, Shanghai 201899, Peoples R China.

MICROMACHINES, 2023; 14 (5):

Abstract

In this paper, the temperature performance of AlN-SAW resonators and AlScN-SAW resonators is studied. They are simulated by COMSOL Multiphysics, and t......

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