Ultrathin-Film Transistors Based on Ultrathin Amorphous InZnO Films

Yue, SL; Lu, JG; Lu, RK; Li, SQ; Lu, BJ; Zhao, Y; Li, XF; Zhang, JH; Ye, ZZ

Lu, JG; Ye, ZZ (reprint author), Zhejiang Univ, Sch Mat Sci & Engn, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China.

IEEE TRANSACTIONS ON ELECTRON DEVICES, 2019; 66 (7): 2960

Abstract

Ultrathin amorphous InZnO (a-IZO) films and the corresponding ultrathin-film transistors (UTFTs) have been prepared by pulsed laser deposition (PLD) f......

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