Graphite production in two-temperature non-LTE plasmas of C4F7N and C5F10O mixed with CO2, N-2, and O-2 as eco-friendly SF6 replacements: A numerical study

Zhong, LL; Gu, Q; Wu, BY

Zhong, LL (corresponding author), Southeast Univ, Sch Elect Engn, 2 Sipailou, Nanjing 210096, Jiangsu, Peoples R China.

PLASMA PROCESSES AND POLYMERS, 2021; 18 (8):

Abstract

Many recent works have shown that C4F7N and C5F10O have a great potential to replace SF6 as a greenhouse gas. One of the biggest problems for their ap......

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