A closed-loop feature-based FTS patterning and characterisation of functional structured surfaces

Tong, Z; Zeng, WH; Zhong, WB; Jiang, XQ

Tong, Z (corresponding author), Univ Huddersfield, Ctr Precis Technol, EPSRC Future Metrol Hub, Huddersfield HD1 3DH, W Yorkshire, England.

SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES, 2021; 9 (2):

Abstract

To improve the feasibility and efficiency of ultra-precision surface structuring, a closed-loop fast-tool-servo (FTS) surface patterning and measureme......

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