Ultra-sensitive graphene membranes for microphone applications

Baglioni, G; Pezone, R; Vollebregt, S; Zobenica, KC; Spasenovic, M; Todorovic, D; Liu, HQ; Verbiest, GJ; van der Zant, HSJ; Steeneken, PG

Baglioni, G; Steeneken, PG (通讯作者),Delft Univ Technol, Kavli Inst Nanosci, Delft, Netherlands.;Steeneken, PG (通讯作者),Delft Univ Technol, Dept Precis & Microsyst Engn, Delft, Netherlands.

NANOSCALE, 2023; 15 (13): 6343

Abstract

Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thicknes......

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