Highly Manufacturable Deep (Sub-Millimeter) Etching Enabled High Aspect Ratio Complex Geometry Lego-Like Silicon Electronics

Ghoneim, MT; Hussain, MM

Hussain, MM (reprint author), King Abdullah Univ Sci & Technol, Integrated Nanotechnol Lab, Thuwal 239556900, Saudi Arabia.; Hussain, MM (reprint author), King Abdullah Univ Sci & Technol, Integrated Disrupt Elect Applicat IDEA Lab, Thuwal 239556900, Saud

SMALL, 2017; 13 (16):

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