Carbonized Polymer Nanostructures for Biosensing

Haque, MA; McFarlane, N; Lavrik, NV; Hensley, D

Haque, MA (reprint author), Univ Tennessee, Elect Engn & Comp Sci, Knoxville, TN 37996 USA.

2019 30TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC), 2019; ():

Abstract

We have implemented carbonized nanostructures on metalized silica substrates as a step towards their integration on CMOS chips. The substrates were me......

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