A submicrometre silicon-on-insulator resonator for ultrasound detection

Shnaiderman, R; Wissmeyer, G; Ulgen, O; Mustafa, Q; Chmyrov, A; Ntziachristos, V

Shnaiderman, R; Ntziachristos, V (corresponding author), Tech Univ Munich, Chair Biol Imaging & TranslaTUM, Munich, Germany.; Shnaiderman, R; Ntziachristos, V (corresponding author), Helmholtz Zentrum Munchen, Inst Biol & Med Imaging, Neuherberg, Germany.

NATURE, 2020; 585 (7825): 372

Abstract

The widely available silicon-on-insulator technology is used to develop a miniaturized ultrasound detector, which is 200 times smaller than the wavele......

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