A novel rapid micromotion compensator for high-precision chip bonding manufacturing

Zhang, LY; Gao, J

Gao, J (corresponding author), Guangdong Univ Technol, State Key Lab Precis Elect Mfg Technol & Equipmen, Guangzhou 510006, Guangdong, Peoples R China.

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2021; 71 (): 282

Abstract

Large-stroke high-speed positioning stages play a significant role in microelectronic packaging manufacturing. Considering the problem of Z-axis bondi......

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