Defect-Stabilized Substoichiometric Polymorphs of Hafnium Oxide with Semiconducting Properties

Kaiser, N; Vogel, T; Zintler, A; Petzold, S; Arzumanov, A; Piros, E; Eilhardt, R; Molina-Luna, L; Alff, L

Kaiser, N (通讯作者),Tech Univ Darmstadt, Adv Thin Film Technol Div, Inst Mat Sci, D-64287 Darmstadt, Germany.

ACS APPLIED MATERIALS & INTERFACES, 2022; 14 (1): 1290