Atmospheric Pressure Electron Detection Method for MEMS Electron Microscope

Krysztof, M; Bialas, M; Grzebyk, T; Gorecka-Drzazga, A

Krysztof, M (通讯作者)，Wroclaw Univ Sci & Technol, Fac Elect Photon & Microsyst, Dept Microsyst, PL-50370 Wroclaw, Poland.

IEEE ELECTRON DEVICE LETTERS, 2022; 43 (5): 813

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