Analysis of uniform structured RF MEMS switch with different uniform and non-uniform meandering techniques

Rao, KS; Sailaja, BVS; Kumar, A; Vineetha, K; Guha, K; Baishanab, KL; Sravani, KG

Rao, KS (corresponding author), Koneru Lakshmaiah Educ Fdn, Dept Elect & Commun Engn, MEMS Res Ctr, Guntur 522502, Andhra Pradesh, India.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2020; 26 (10): 3193

Abstract

This paper mainly focuses on the investigation of different meandering techniques for the MEMS RF shunt capacitive switch. It involves three meanderin......

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