A Novel Rhombic Piezoelectric Actuator Applied in Precision Positioning Stage

Lu, Q; Chen, XF; Huang, WQ

Lu, Q (corresponding author), Yancheng Inst Technol, Sch Mech Engn, Yancheng City 224051, Jiangsu, Peoples R China.

JOURNAL OF APPLIED SCIENCE AND ENGINEERING, 2020; 23 (3): 405

Abstract

In order to solve the contradiction between high precision and large working stroke in the traditional parallel stage, a novel rhombic piezoelectric a......

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