Humidity Sensors with Shielding Electrode Under Interdigitated Electrode

Liu, H; Wang, Q; Sheng, WJ; Wang, XB; Zhang, KD; Du, L; Zhou, J

Zhou, J (reprint author), Fudan Univ, ASIC, Shanghai 200433, Peoples R China.

SENSORS, 2019; 19 (3):

Abstract

Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst o......

Full Text Link