High spatial resolution absorption contrast imaging with electron-beam excitation assisted optical microscope

Inami, W; Fukuta, M; Kawata, Y; Terakawa, S

Inami, W (reprint author), Shizuoka Univ, Grad Sch Sci & Technol, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328561, Japan.; Inami, W (reprint author), Shizuoka Univ, Res Inst Elect, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328561, Japan.

ASIA-PACIFIC CONFERENCE ON FUNDAMENTAL PROBLEMS OF OPTO- AND MICROELECTRONICS, 2017; 10176 ( ):

Abstract

We present high spatial-resolution label-free imaging with an electron-beam excitation-assisted optical microscope (EXA microscope). The EXA microscop......

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