High-precision grating period measurement

Photia, T; Temnuch, W; Srisuphaphon, S; Tanasanchai, N; Anukool, W; Wongrach, K; Manit, P; Chiangga, S; Deachapunya, S

Deachapunya, S (reprint author), Burapha Univ, Fac Sci, Dept Phys, Muang Dist 20131, Chonburi Provin, Thailand.; Deachapunya, S (reprint author), Commiss Nigher Educ, Thailand Ctr Excellence Phys, Bangkok 10400, Thailand.; Deachapunya, S (reprint author),

APPLIED OPTICS, 2019; 58 (2): 270

Abstract

We introduce a method for measuring a periodic structure, particularly a grating period. The method is based on the high-precision laser Talbot effect......

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