Modeling of the removal mechanism of monocrystalline silicon-based on phase change-dislocation theory and its edge chipping damage during micro-grinding

Li, W; Li, ZP; Yang, J; Ren, YH; Jiao, Y; Hegab, H; Ibrahim, AMM

Li, W (corresponding author), Hunan Univ, Coll Mech & Vehicle Engn, Changsha 410082, Peoples R China.

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2021; 71 (): 103

Abstract

The micro-grinding of complex meso/micro-components of hard and brittle materials have attracted much attention in recent years. However, little relat......

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