Relative positioning control of flexible structure for precise positioning stage

Ogawa, H; Kobayashi, Y; Emaru, T

Ogawa, H (corresponding author), Hitachi Ltd, Res & Dev Grp, Ctr Technol Innovat Mech Engn, 832-2 Horiguchi, Hitachinaka, Ibaraki 3120034, Japan.

MECHANICAL ENGINEERING JOURNAL, 2020; 7 (2):

Abstract

Precise positioning technologies are widely used in industrial machines such as device manufacturing equipment. Many studies have been done on feedbac......

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