Directed Self-Assembly (DSA) For Contact Applications

Weng, MH; Ko, TH; Lee, CJ; Shen, HP; Wu, CH; Hsieh, KH; Huang, YC; Wu, CH; Lee, CJ; Chang, CY; Lin, CH

Weng, MH (reprint author), Taiwan Semicond Mfg Co Ltd, 168 Pk Ave 2,Hsinchu Sci Pk, Hsinchu 30075, Taiwan.

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXV, 2018; 10586 ():

Abstract

Directed self-assembly (DSA) of block copolymers offers opportunities for resolution enhancement of existing patterning by pitch splitting, contact ho......

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